Title: SPTS - etch, deposition and thermal equipment for semiconductor industry
Description: SPTS manufactures etch, deposition and thermal systems for customers in MEMS, Power Devices, Optoelectronic, Compound Semiconductor, Advanced Packaging and Data Storage.
Keywords:SPTS Technologies, SPTS, STS, Aviza, plasma etch, silicon DRIE etch, ICP etch, PECVD, PVD, compound semiconductor, LEDs, MEMS, 3D-IC, DSi, DRIE, HF etch, thermal processing
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